1. Photoacid generators

a. Triazines

b. Iodonium salts

c. Sulfonium salts

d. Sulfonic acid ester

e. Diazomethane

2. Photobase generators

3. Photoaccelerators

4. Photosensitizers

5. Solubility inhibitor

6. Dissolution inhibitor

Product name

max m.p.

Physical characteristics